Abstract
Absolute ionization probabilities R for Ta + secondary ions are determined both experimentally from comparative in-situ SNMS and SIMS measurements and theoretically on the basis of recent microscopic ionization theories as a function of the oxygen surface concentration c O. The theoretically predicted c O dependence of R for sputtered Ta particles is found to agree well with the experimental results. The comparison between experiment and theory gives quantitative estimates of factors which influence the oxygen induced ion yield enhancement.
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