Abstract
The electrical conduction mechanisms of Ni–Cr thin film resistor are demonstrated by different film thickness through scattering models fitting. The resistivity and temperature coefficient of the resistance of Ni–Cr thin film are measured to investigate the influence of thickness with different annealing temperature. Finally, an oxidation and atom inter-diffusion model was proposed to explain the effects of film thickness on the electrical properties of Ni–Cr thin film resistor under different annealing temperature.
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