Abstract
This paper presents a new application of spin-on glass to fabricate nonplanar dielectric structures (channel plate microstructures) with aspect ratios (i.e., ratio of channel length to channel width) of 20:1. A variety of microchannel geometries have been fabricated. The LIGA process is used to make nickel molds up to 150 /spl mu/m in height with mechanically planarized surfaces. Spin-on glass (SOG) is applied to obtain glass structures in nickel molds. A multiple dispensing/drying/curing process was developed resulting in crack-free SOG structures. Reverse electroplating is used to remove the nickel mold and release the glass structures. The resulting freestanding glass microchannel plates (>100 /spl mu/m in height) demonstrated good electrical properties (400-V//spl mu/m breakdown voltage) and good spatial definition.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
