Abstract
By decreasing reacting gas pressure, nanocrystalline diamond films, the area of which reaches 2 inches were deposited with hot filament chemical vapor deposition (HFCVD) equipment. According to the analysis with high-resolution transmission electron microscopy (HRTEM), the grain size averages approximately 4–8 nm and the nanometer crystalline diamond grains are surrounded by amorphous ingredient. The sharp diamond and graphite peak can be shown by ultraviolet (UV) (244 nm) Raman spectroscopy. The wire drawing die coated by common diamond film and this film can last more than 10-fold move than that coated by common hard alloy.
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