Abstract
Abstract The fabrication and performance characteristics of coplanar contact etched mesa-buried heterostructure (EMBH) distributed feedback (DFB) lasers emitting at 1.3μm wavelength are described. The processing was designed such that the lasers could be evaluated as coplanar contact or conventional (top/bottom) contact devices. The threshold current was as low as 14mA and the 3dB small signal response was as high as 9.4 GHz. Both these properties showed negligible differences when the device was biased either coplanarly or conventionally.
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