Abstract
The hydrolytic properties of LiAlO2 (LAO) are important factors for its applications on LED fabrication. During soft pad polishing process, the H2O in the slurry is deleterious for LAO surface polishing results. The current study develops a material removal rate model for materials with hydrolysis reaction to predict the result of polishing process.The current research conducts the experimental studies to investigate the material removal rate and its mechanism during the soft pad polishing process. In the experimental study, the hydrolytic properties of LAO have been tested to understand the hydrolysis speed with different operation parameters to assist the development of the theoretical model. Also the material removal rates of LAO with hydrolytic property have been measured under different soft pad polishing operating conditions. The experimental results provide the hydrolytic properties of LiAlO2 to understanding of the mechanism on polishing process.
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