Abstract
The SAW propagation properties of an ion assisted deposited (IAD) 600 nm boron nitride (BN) film on ST quartz has been characterized experimentally. The BN film was formed by the evaporation of boron bombarded with energetic ions of nitrogen. The SAW propagation properties were measured over a frequency region from 30 MHz to 1.0 GHz with pairs of interdigital transducer electrodes formed on the BN film surface. Velocity dispersion characteristics for the GSAW, PSAW, and HVPSAW modes were determined. For the GSAW mode the velocity increased whereas the velocity decreased for the PSAW mode. The GSAW propagation loss in dB/cm increased as the frequency squared and was 10 dB/cm at 400 MHz. The propagation losses were reduced by a factor of 2 for the PSAW mode with the BN film present as compared to the ST quartz with no film. The amorphous equivalent elastic constants of the BN film were estimated and fell well below those of cubic BN. Optical spectra, FTIR, and AFM measurements were made to better define film composition and structure.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
