Abstract
In order to accurately measure the pressure and the pressure difference between two points in the vacuum chamber, a large number of experimental data were used to research the performance of the three capacitance diaphragm gauge and analysis the main influences of the uncertainly degree of pressure in the process. In this paper, three kind of uncertainty, such as the single uncertainty, the synthesis uncertainty and the expanded uncertainty of the three capacitance diaphragm gauges are introduced in detail in pressure measurement. The results show that the performance difference of capacitance diaphragm gauge can be very influential to the accuracy of the pressure difference measurement and the uncertainty of different pressure can be very influential to pressure measurement. That for accurately measuring pressure and pressure difference has certain reference significance.
Highlights
The progress of science and technology depends on the development of microelectronics and semiconductor technology that the upgrading and renewing of equipment and technology of microelectronics and semiconductor grow rapidly
Various factors [4] which influence the uncertainty are analyzed and the results provide a base for measuring pressure or pressure differences
Lacking of a more precise instrument for reference, it is difficult to determine which regulate has the highest accuracy through experiment result but its stability can be judged by the standard deviation
Summary
The progress of science and technology depends on the development of microelectronics and semiconductor technology that the upgrading and renewing of equipment and technology of microelectronics and semiconductor grow rapidly. This attracted some researchers to study on it. Regardless of from equipment research and development or technological parameters on the need to measure pressure in integrated circuit (IC) processing chamber. How to cite this paper: Zhou, Y.L., Quan, X. and Yang, T.N. (2015) The Evaluation of Measurement Uncertainty and Its Application in the Vacuum Pressure Measurement. Open Journal of Applied Sciences, 5, 495-500.
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