The EUV performance of an ion-etched blazed diffraction grating

Abstract

A spherical holographic ion-etched diffraction grating with low-blaze angle has been purchased for the purpose of vendor evaluation. We present the results of surface measurements made on the bare grating substrate using an atomic force microscope. The efficiency of the grating at grazing incidence and at EUV wavelengths was measured using a synchrotron light source. After coating the grating with a multilayer, the normal incidence efficiency was measured. The results of these measurements are compared to those obtained from samples from other vendors.