The ethanol sensing property of magnetron sputtered ZnO thin films modified by Ag ion implantation

Abstract

The authors present the gas sensors using magnetron sputtered ZnO films modified by Ag ion implantation. The results indicate the sensing response of ZnO films is improved by Ag ion implantation, and the sensing response increases with the Ag ion implantation doses. The possible reason of the improved sensing property is that the metallic Ag distributed on the nanograins of implanted ZnO films enhances chemical adsorption and promote catalytic reaction at the surface. However, after long-time conservation, obvious response deterioration for the Ag ion implanted ZnO sensor took place.