Abstract
In this paper, a method predicting crack onset strain in thin film/substrate system with residual stress is proposed. For thin film materials with size effect, the strength criterion is improved by considering the variation of film cohesive strength. The modified strength criterion is more accurate in fitting the crack density than energy criterion. According to the modified strength criterion, the crack onset strains of three kinds SiNx films prepared in our work are 1.21 %, 1.25 % and 1.10 %, respectively. It is proved that the crack onset strain predicted by the modified strength criterion is accurate by bending test. Our work provides a new method for determining the crack onset strain of various composite films more accurately.
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