Abstract

The erosion behavior of liquid tin (Sn) under bias voltage system assisted Ar plasma environment in SCU-PSI was investigated. Optical emission spectroscopy was applied to detect and characterize the emission line of tin spectrum. The result showed that the loss part of tin atom in the plasma beam was very limited. The temperature-dependent abnormal enhanced erosion phenomenon was observed during the plasma irradiation process, and superficial adsorbed atoms model was employed to depict the inherent physical process. The obtained surface binding energy fitted well to our experiment results and other reports. In addition, the incident energy-dependent enhanced erosion behavior was also discussed, obvious tiny tin droplets could be observed separating from capillary porous system at the bias voltage of 25 V, which would be the incident plasma limit value for our experimental setup.

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