Abstract
The velocity distributions of carbon atoms released by argon ion bombardment of graphite have been measured using a time-of-flight method. As expected, at room temperature we observe a velocity distribution of the sputtered carbon atoms due to a collision cascade mechanism. At elevated temperatures, the velocity distributions cannot be interpreted by a collision cascade mechanism even though a low surface binding energy is assumed. They can be explained by thermal desorption with a Maxwell-Boltzmann distribution near the bulk temperature.
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