The energy spectra of the secondary ion emission for transition metals of the fourth period

Abstract

The energy spectra of the secondary ion emission (SIE) for transition metals of the fourth period are calculated under the assumption that SIE is caused by the joint action of electron-exchange and kinetic ion emission (KIE) mechanisms. Some improvement of the KIE theory is carried out for the cases of high (of the order of tens of keV) and low (less than 2 keV) energies E O of bombarding ions. It is found that the KIE plays an essential role in SIE, starting from the E O value of the order of tens of keV. It is shown that the KIE energy spectra (1) are broader than the sputtering energy spectra by an order of magnitude, (2) differ essentially in both cases indicated, (3) show a peak (at high E O in accordance with an experiment) or a break (at low E O ) near to the secondary ion energy corresponding to the KIE threshold.