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Abstract
In this work, the emission spectra and atomic structure of the aluminum target had been studied theoretically using Cowan code. Cowan code was used to calculate the transitions of electrons between atomic configuration interactions using the mathematical method called (Hartree-Fock). The aluminum target can give a good emission spectrum in the XUV region at 10 nm with oscillator strength of 1.82.The hydrodynamic properties of laser produced plasma (LPP) were investigated for the purpose of creating a light source working in the EUV region. Such a light source is very important for lithography (semiconductor manufacturing). The improved MEDUSA (Med103) code can calculate the plasma hydrodynamic properties (velocity, electron density, pressure, electron temperature, ion density, ion temperature and average ionization Z*). Aluminum target was considered in these calculations (Z=13). This work was done by using three laser power densities (1011, 1012 and 1013 W/cm2) with a 10 ns pulse width and 10 ps pulse width for laser wavelength (1064 nm). These laser intensities with 10 ns pulse width give high ionization stage of the Aluminum from 2.4-11 for electron range from 16.5-3000 eV.
Highlights
There are four specific features that characterizing the laser produced plasma, which are [1]: 1- High temperature. 2- High density. 3- Relatively high degree of ionization. 4- High expansion velocities.when the laser radiation first reaches the target, the penetration can happen for only a very short depth
The spatial and temporal hydrodynamics are calculated by using the laser-matter interaction program Med103
In Medusa code, the plasma is assumed to consist of a charged-neutral mixture of electrons and various species of ions and atoms or molecules.The instantaneous local chemical composition can be described by a set of fractions fk so that [14]
Summary
There are four specific features that characterizing the laser produced plasma, which are [1]: 1- High temperature (up to 100 eV). 2- High density When the laser radiation first reaches the target, the penetration can happen for only a very short depth. The calculations of numerical hydrodynamic are important to calculate the spatial and temporal velocity, temperature, pressure and ion distribution in laser produced plasma. The spatial and temporal hydrodynamics are calculated by using the laser-matter interaction program Med103 (which is improved from MEDUSA code). New equations of state as an option to 'Medusa', based on the ThomasFermi model in 1980. Another addition was made in 1983, in which radiation transport by X-ray photon was added for comparison with spectroscopic results, with the details of line shape and line intensity ratio. Another addition was made in 1983, in which radiation transport by X-ray photon was added for comparison with spectroscopic results, with the details of line shape and line intensity ratio. [7, 8]
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