The emerging plasma beam from a duoplasmatron source and the potential for material sputtering

Abstract

The UMIST duoplasmatron provides high plasma particle emission rates in excess of 5*1017 S-1 and energetic stream conditions. Plasma ions are ejected with supersonic velocities. The expansion of the emerging hydrogen plasma and subsequent ion acceleration to mean energies of over 130 eV are modelled using a simple fluid description. A technique for exchanging hydrogen ions for argon in the expanding beam is demonstrated, giving energetic, heavy-ion stream conditions. The potential for using the duoplasmatron as a source of ions for direct sputtering of insulating materials is discussed.