Abstract
The main purpose of this paper is to study the relationship of CPW's structural parameters while the benchmark impedance of CPW is 50O, and the CPW of LiTaO3 electro-optical modulator is taken as an example. Conformal mapping theory is used to obtain the numerical relationship of electrode structure, thickness of the substrate and properties parameters, and the results show that the little change of electrode width would affect the CPW remarkably, 1µm shift of the center conductor width will induce the change in the benchmark impedance ranging from 5.35% to 5.78%. For the design of the characteristic line impedance of 50O CPW, symmetrical structure is a good choice. The formulas and analyses are useful in the design of coplanar wave guides of LiTaO3 electro-optical modulator.
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