Abstract
Thin palladium films are deposited on boron-doped p-type Si(111) single crystals under UHV conditions. The structure is studied in situ by LEED and Auger analysis, in addition the resistivity is measured with the help of a four-probe technique. The resistivity always decreases with increasing film thickness. For films deposited on an oxygen-free silicon surface with a 1 Ă 1 structure, the decrease mainly occurs at very low thicknesses, then the resistivity approaches a saturation value which is characteristic of a layer-by-layer growth. For films deposited on silicon with oxygen present in the surface, a steep decrease is observed at much higher thicknesses. Island growth is then the dominating factor for the conduction behaviour.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.