The electrical and reliability effect of bottom electrode materials characteristics of (Ba,Sr)TiO/sub 3/ capacitors

S.C Sun,M.S Tsai

doi:10.1109/iedm.1997.650375

The electrical and reliability effect of bottom electrode materials characteristics of (Ba,Sr)TiO/sub 3/ capacitors

S.C Sun, M.S Tsai

https://doi.org/10.1109/iedm.1997.650375

Copy DOI

Publication Date: Dec 7, 1997

Citations: 1

Affiliation: National Yang Ming Chiao Tung University

#Ir Bottom Electrodes #Dielectric Leakage Current + Show 8 more

Abstract
Full-Text PDF
Similar Papers

Abstract

(Ba,Sr)TiO/sub 3/ (BST) thin film capacitors using Pt, Ir, IrO/sub 2//Ir, Ru and RuO/sub 2//Ru bottom electrode materials are investigated for high density DRAMs. Excellent electrical characteristics (e.g. high dielectric constant and low leakage current) and TDDB reliability of BST capacitors with Ir bottom electrodes were obtained. The dielectric constant and leakage current of BST on Ir were further improved by postdeposition annealing in O/sub 2/ at 600/spl sim/700/spl deg/C.

Full Text