Abstract
In high accuracy radius of curvature (ROC) measurement, discrepancy may exist in results on the same optical surface under different temperature. In this paper, the effects of temperature on ROC are analyzed systematically including system error of interferometry and thermal self-deformation of spherical optical elements. The self-deformation is simulated by finite element analysis method and experiments are carried out on a set of elements with different ROC, repeatedly measured by interferometry. The result shows that the effects of thermal field on ROC augment with the increasing of radius of measured surface and that the experimental results show consistency with the theoretical analysis, thus demonstrating that the effects on ROC can be estimated and compensated under different temperature variation.
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