The effects of source doping concentration and doping gradient on the ON-state current of Si nanowire TFETs

Abstract

The tunnel field-effect transistor (TFET) is considered a promising next-generation transistor due to its potentially limit-breaking low subthreshold swing and better immunity against short-channel effects. However, the low ON-state current (ION) of TFETs has been a critical problem. In this work, we investigated the effects of the source doping concentration and the source doping gradient (SDG) on the ION of n-type Si gate-all-around (GAA) nanowire (NW) TFETs using an ATLAS device simulator. Unexpectedly, we found that increasing the source doping concentration does not necessarily improve ION, especially for TFETs with a large SDG. Moreover, although reducing the SDG indeed increases ION, for TFETs with low source doping concentration (e.g., 1 × 1019 cm−3), the improvement in ION by reducing the SDG becomes insignificant.