Abstract
Small errors in the relative amplitude attenuation tan Ψ of a reflecting surface can cause appreciable error in the calculated thickness of a thin film on a substrate, especially if no prior knowledge of the refractive index of the film is available. Such errors can arise if either a perfect polarizer or an ideal compensator is assumed in the analysis of data. The exact ellipsometry equations including polarizer ellipticity are derived with numerical examples. A procedure for instrument calibration is described, and experimental results using this procedure are presented.
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