Abstract
An increasing number of groups use Heavy Ion Elastic Recoil Detection Analysis (HIERDA) to study a wide range of problems in materials science, however there is no accurate and reliable methodology for the analysis of HIERDA spectra. Major impediments are the effects of multiple and plural scattering which are very significant, even for quite thin (∼100 nm) layers of very heavy elements. To examine the effects of multiple scattering, a fast FORTRAN version of TRIM has been adapted to simulate the spectrum of backscattered and recoiled ions reaching the detector. The results of the simulations will be compared with experimental measurements on well characterized samples of thin Au layers on Si performed using ToF-E HIERDA at the Lucas Heights Laboratories of the Australian Nuclear Science and Technology Organization.
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