Abstract
Accurate simulation of the transport and energy-loss of energetic electrons is an important step in modeling ion-induced effects in materials. Dose distribution functions (or so-called dose point kernels, DPKs) represent one of the most basic and useful quantities for characterizing the spatial distribution of energy deposition in matter. In the present work we investigate the effect on DPK of various models for the elastic scattering cross-section and energy-loss straggling distribution widely used in Monte Carlo simulation of electron transport above a few keV. Our findings indicate that, overall, the DPK is not very sensitive to the examined physical models, except at the tail of the distribution where a strong dependence is observed. The present comparison can be useful for avoiding systematic errors in the simulation of electron transport at primary energies from several keV to a few MeV and to suggest further improvement in the existing codes.
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