Abstract
The properties of titanium foils that have been used for a long time in electron guns of e-beam-pumped excimer lasers have been studied. The tensile strength of these foils did not change when irradiated with e-beam pulses (300 keV) with doses up to 1 GGy. On the surface of Ti foils in contact with a fluorine-containing gas mixture during irradiation by e-beam, peaks corresponding to TiO2, TiN, and TiF were detected by Raman scattering.
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