Abstract
The electrical characteristics of a GaAs MESFET are shown to be variously affected by deep levels, depending on their location in the gap and where they are in the device. An appropriate variation of the DLTS technique can be used to characterize deep levels in a MESFET. Measurements performed at emission time constants down to 0.6 ns have permitted a quantitative study of microwave noise due to electron traps in the channel. A spurious backgating effect in GaAs integrated circuits is due to hole traps on the substrate side of the active layer-substrate interface. The free surface of GaAs MESFETs is usually depleted due to the presence of surface states. Their charge state can be modified by lateral carrier transport on the GaAs surface, which affects the device electrical performances.
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