The effect of water diffusion on the adhesion of organosilicate glass film stacks

Abstract

Organosilicate glass (OSG) is a material that is used as a dielectric in advanced integrated circuits. It has a network structure similar to that of amorphous silica where a fraction of the Si–O bonds have been replaced by organic groups. It is well known from prior work that OSG is sensitive to subcritical crack growth as water molecules in the environment are transported to the crack tip and assist in rupturing Si–O bonds at the crack tip. In this study, we demonstrate that exposure of an OSG containing film stack to water prior to fracture results in degradation of the adhesion of the film stack. This degradation is the result of the diffusion of water into the film stack. We propose a quantitative model to predict adhesion degradation as a function of exposure time by coupling the results of independent subcritical crack growth measurements with diffusion concentration profiles. The model agrees well with experimental data and provides a novel method for measuring the water diffusion coefficient in film stacks that contain OSG. This study has important implications for the reliability of advanced integrated circuits.