Abstract
Numerical solutions of the conservation of mass, momentum, and energy equations in a horizontal organometallic vapor phase epitaxial reactor have been obtained for different temperature boundary conditions. The idealized case of isothermal reactor walls was compared to the physically realistic case of a wall which interacts radiatively and convectively with its surroundings. The thermal radiation analysis includes a two‐band model for the nongray, semitransparent, quartz walls of the reactor. The radiation analysis is coupled with convection to (or from) the gas on the inside and to the ambient on the outside of the reactor. Wall heating is shown to have a substantial effect on the velocity and temperature fields in the reactor. The simulated temperature fields show a close match with experimental results. The temperature distribution along the wall for the radiation case was compared with the isothermal case. Finally, the effect on growth rate along the susceptor was studied.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
