Abstract

The selection of vibration mode is very important during the design stage of ultrasonic motors. It is also a significant factor infecting motor's performance. The selective principle of ultrasonic motor's vibration mode and the forms of resonance mode are introduced in this paper. Using FEA method, motor's vibration modes and oscillating frequencies have been measured. Oscillating frequencies under different modes have been surveyed by using impedance characteristic analysis instrument. The results are in accord with FEA outcome. Finally, motor's operation performance under different modes has been analyzed.

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