Abstract
The reactant gas used as the deposition ambient has a large effect on the composition and properties of cuprate superconductor films. In this study YBa 2Cu 3O x thin films are deposited by pulsed organometallic beam epitaxy (POMBE). The barium precursor used contains fluorine and it is therefore possible to incorporate unwanted fluorine into the deposited film. For our deposition process both the fluorine content and oxygen content of the film are highly dependent on the reactant gas used as the deposition ambient. Many of the reaction conditions that remove fluorine also deplete the film of oxygen. In this study a set of reaction conditions that produce YBa 2Cu 3O x films which are both fluorine-free and fully oxygenated are presented.
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