Abstract
Features of the profiles of silver ions implanted into a soda-lime silicate glass were studied depending on the substrate temperature varied in a narrow range from 20 to 100°C. The implant depth-concentration profiles were modeled with an allowance for a thermostimulated increase in the diffusion mobility of the implanted impurity in the sample volume. It is shown that an increase in the substrate temperature by several tens of degrees leads to a diffusion smearing of the implanted impurity profile and, hence, to a decrease in the local implant concentration hindering the metal silver nucleation. An analysis of the results of modeling points to the need in thoroughly controlling the substrate temperature in order to provide for the required conditions of the metal nanoparticle synthesis and to obtain the metal-glass composites with reproducible characteristics.
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