Abstract
Recently, we reported that X-ray diffraction peaks due to the YBa2Cu4O8 phase were detected1), when metal organic chemical vapor deposition (MOCVD) films were fabricated at a susceptor temperature of 800°C by controlling the overall composition within certain limits. In this study, efforts were focused on clarifying the effects of oxygen partial pressure and susceptor temperature on appearance of the 124 phase. The 124 phase existed only in films fabricated at susceptor temperatures below 800°C under oxygen partial pressure of 7.5 torr while the overall composition was controlled within certain limits. Oxygen partial pressure was found to affect the appearance of the 124 phase significantly.
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