Abstract
Thick diamond films are needed for high power device applications. One approach is to grow via the step-flow growth mode on miscut substrates. In this paper we correlate variations of surface morphology and optical properties of a 250 μm-thick undoped diamond layer, grown at a rate of 10.4 μm/h, on a (001) diamond substrate with a miscut angle of 10 degrees towards a <010> direction. The epilayer surface comprises regions with island growth on (001) planes, and regions parallel to the miscut substrate surface exhibiting step-bunching and faceting and resulting in various degrees of surface roughness. The optical properties exhibit a combination of sharp and broad luminescence peaks, which are found to be specific to growth morphology and to the nitrogen content in the near-surface region.
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