Abstract
Pull-in instability and free vibration of cantilever and clamped-clamped beam-type nanoactuators, which are made of Functionally graded materials (FGMs), are investigated using the Modified strain gradient theory (MSGT) under the influence of electrostatic and intermolecular forces. It is assumed that the functionally graded nano-beam made of nickel and silicon nitride and mechanical properties of the nano-beam vary continuously and smoothly in the thickness direction by a simple power-law distribution. Differential quadrature method (DQM), Differential transformation method_Pade approximant (DTM_Pade) and Lumped parameter model (LPM) are used to solve the nonlinear governing equation of the nano-beam, and the obtained results from these methods are compared together. In the end, the effects of size, variation of the length scale parameter, and the volume fraction are discussed and examined. The results show that there are a good agreement between the MSGT and the experimental results, so it can be conclude that the size effect has a substantial impact on the pull-in instability and free vibration results of the beam-type micro/nanoactuator.
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