Abstract
Dual-frequency capacitive discharges are used to separately control the mean ion energy, ε¯ion, and flux, Γion, at the electrodes. We study the effect of secondary electrons on this separate control in argon discharges driven at 2+27 MHz at different pressures using Particle in Cell simulations. For secondary yield γ≈0, Γion decreases as a function of the low frequency voltage amplitude due to the frequency coupling, while it increases at high γ due to the effective multiplication of secondary electrons inside the sheaths. Therefore, separate control is strongly limited. ε¯ion increases with γ, which might allow an in situ determination of γ-coefficients.
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