The effect of residual lens aberrations on the determination of column positions around partial dislocations in GaAs

Abstract

Journal Article The effect of residual lens aberrations on the determination of column positions around partial dislocations in GaAs Get access X Xu, X Xu Dept. of Materials Science and Engineering, University of California, Berkeley, CA 9472National Center for Electron Microscopy, Lawrence Berkeley national Laboratory, Berkeley, CA 9472 Search for other works by this author on: Oxford Academic Google Scholar SP Beckman, SP Beckman Dept. of Materials Science and Engineering, University of California, Berkeley, CA 9472Material Science Division, Lawrence Berkeley National Laboratory, Berkeley, CA 9472 Search for other works by this author on: Oxford Academic Google Scholar P Specht, P Specht Dept. of Materials Science and Engineering, University of California, Berkeley, CA 9472 Search for other works by this author on: Oxford Academic Google Scholar DC Chrzan, DC Chrzan Dept. of Materials Science and Engineering, University of California, Berkeley, CA 9472Material Science Division, Lawrence Berkeley National Laboratory, Berkeley, CA 9472 Search for other works by this author on: Oxford Academic Google Scholar ER Weber, ER Weber Dept. of Materials Science and Engineering, University of California, Berkeley, CA 9472Material Science Division, Lawrence Berkeley National Laboratory, Berkeley, CA 9472 Search for other works by this author on: Oxford Academic Google Scholar C Kisielowski C Kisielowski National Center for Electron Microscopy, Lawrence Berkeley national Laboratory, Berkeley, CA 9472 Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 9, Issue S02, 1 August 2003, Pages 498–499, https://doi.org/10.1017/S1431927603442499 Published: 22 July 2003