Abstract

ABSTRACTWe present evidence on the types of structural changes caused by the rapid thermal annealing of two types of heteroepitaxial layers: CaF2/CoSi2/Si(111) and Si(100) on A12O3 (1102). We find that grains in a film can be merged into a single crystal and that the microtwin density can be dramatically lowered. We also find a number of changes in the structure of the heteroepitaxial interfaces.

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