Abstract

In this paper nanocrystalline diamond films have been deposited initially through a novel technique periodic magnetic field (PMF) (magnetic field B=B0sinωt) assisted hot filament chemical vapor deposition. The effect of the increasing angular frequency (ω) on diamond film deposition was investigated. SEM and Raman spectroscopy were used to characterize film. It was found that higher ω was in favor of nano-diamond film growth. Field emission results show that the turn-on electric field of the nano-diamond film deposited at ω=20,000rpm was 2.9V/μm, and its current density reached 32.7μA/cm2 measured at an applied field 6.5V/μm.

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