The effect of nitrogen on competitive growth mechanisms of diamond thin films

Abstract

The correlation between surface morphology and texture (distribution of crystal orientations) has been analyzed to determine how nitrogen provides a competitive growth advantage for the formation of 001 texture in diamond films. The film morphologies were measured using TappingMode@ atomic force microscopy. Corresponding texture studies were performed using X-ray diVraction with a four-circle goniometer to measure (111), (220) and (400) pole figures. Orientation distributions were generated from the pole figures, from which inverse pole figures were made to quantify how texture was aVected by process variables. After 2 h of growth, with and without nitrogen, similar textures were observed. With increasing time, nitrogen stimulates the growth of orientations between 001, 114, and 104. Without nitrogen, the majority orientation is 101 with a secondary component near 113. Examination of fracture surfaces indicates correlations with the observed texture and morphology changes. © 2000 Elsevier Science S.A. All rights reserved.