The effect of nanoparticle morphology in the filtration efficiency and saturation of a silicon beads fluidized bed

Abstract

AbstractPolysilicon is a key commodity required for both electronics and solar photovoltaic modules. The traditional route to produce polysilicon involves the Siemens reactor, an energy intensive batch process. A more efficient, but more complex alternative process is the fluidized bed reactor (FBR). In an FBR silane is pyrolysed producing chemical vapor deposition (CVD) and aerosols. Efficient FBR operation requires yield optimization together with continuous and stable operation of the reactor. Such optimization is not straightforward because the aerosol formation mechanisms and incorporation into the FBR beads are not completely understood. In this work, two model aerosols with different morphology were tested and their filtration efficiency between 20 and 800 nm was determined. Bead saturation at different times was determined for each morphology and the scavenging factor over time for each case is reported. Such information can be of interest for establishing bed recirculation needs in a silicon FBR.