Abstract

The oxygen vacancies in the TiOx active layer play the key role in determining the electrical characteristics of TiOx–based memristors such as resistive-switching behaviour. In this paper, we investigated the effect of a multi-layer stacking sequence of TiOx active layers on the resistive-switching characteristics of memristor devices. In particular, the stacking sequence of the multi-layer TiOx sub-layers, which have different oxygen contents, was varied. The optimal stacking sequence condition was confirmed by measuring the current–voltage characteristics, and also the retention test confirmed that the characteristics were maintained for more than 10,000 s. Finally, the simulation using the Modified National Institute of Standards and Technology handwriting recognition data set revealed that the multi-layer TiOx memristors showed a learning accuracy of 89.18%, demonstrating the practical utilization of the multi-layer TiOx memristors in artificial intelligence systems.

Highlights

  • Oxide-based memristive devices have attracted considerable interest due to their advantages such as non-volatile memory function, fast switching speed, low power consumption, good durability, process compatibility with complementary metal-oxide semiconductor technology, as well as the possibility of being implemented in real hardware and board-integrated systems [1,2,3,4,5,6]

  • The memristor devices are constructed with a metal−insulator−metal (MIM) structure with an active layer sandwiched between the two counter electrodes

  • Based on the history of the applied bias, the memristors are switched between high-resistive state (HRS) and low-resistive state (LRS) by the modulation of the resistance of the active layer

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Summary

Introduction

Oxide-based memristive devices have attracted considerable interest due to their advantages such as non-volatile memory function, fast switching speed, low power consumption, good durability, process compatibility with complementary metal-oxide semiconductor technology, as well as the possibility of being implemented in real hardware and board-integrated systems [1,2,3,4,5,6]. The simple two-terminal crosspoint structure of memristors is expected to enable the high-density integration of computing devices by adopting three-dimensional stacking architectures [1,7]. Due to these advantages, various emerging electronics such as neuromorphic circuits and systems have been demonstrated by utilizing the memristors as one of their key elements [8,9]. Based on the history of the applied bias, the memristors are switched between high-resistive state (HRS) and low-resistive state (LRS) by the modulation of the resistance of the active layer. Many different material candidates have been investigated such as TiO2, HfO2, NbO2, TaOx, ZnO and

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