Abstract
This paper presents our work in developing a force controlled microgripper and micrograsping strategies using optical beam deflection techniques. The optical beam deflection sensor is based on modified atomic force microscopy techniques and is able to resolve forces below a nano-Newton. A variety of gripper fingers made from materials with different conductivity and surface roughness is analyzed theoretically and experimentally using the force sensor. These results provide insight into the mechanics of micromanipulation, and the results are used to develop micrograsping strategies. A design of a microfabricated force controlled microgripper is presented along with initial experimental results in applying various gripping forces to microparts. The results demonstrate the important role gripping force plays in the grasping and releasing of microparts.
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