Abstract

Cu2O(111) surfaces were studied under conditions typically used in Auger depth profiling, i.e. under electron and ion bombardment. Compositional changes were measured with AES as function of energy and mass of the ions. By increasing the ion energy from 0.5 to 4 keV and the atomic weight of the bombarding gas from 20 to 131, an increase of the oxygen-to-copper ratio by about 1% and 2.5%, respectively, was obtained. The Auger line shapes were not markedly influenced by a change of the ion energy. The oxygen-to-copper ratio increased by several percent during ion bombardment of a sample which was prepared by cleaving in situ. Heating to at least 150°C leads to a decrease of the oxygen enrichment as well as of the concentration of implanted Ar. No electron beam effects could be detected in these experiments.

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