Abstract
The electrical characteristics of hydrogen annealing on the molybdenum doped ZnO (MZO) thin film were discussed in the paper. The MZO film was deposited by an radio frequency sputtering, then it was annealed in hydrogen with a microwave plasma chemical vapor deposition system. The resistivity of MZO was decreased from 1.1 × 10−2 to 9.5 × 10−3 Ω cm after the hydrogen annealing. Improvements of the electrical properties are both due to the defects repairing through annealing and hydrogen doping effects of the MZO thin film. The higher temperature annealed MZO film shows slightly lower transmittance which is due to the higher carrier concentration.
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