Abstract

In the paper, different phosphorus content Ni-P coatings was prepared by electroless plating. The microstructural changes of electroless Ni-P coatings on both as-deposited condition and heat treatment were investigated by X-ray diffractometry (XRD). The relationship between microstructure of Ni-P coatings and phosphorus content and heat treatment temperature were discussed. This conclusion provided a good theoretical basis for Ni-P coating using for wear and corrosion resistances in the technology of MEMS.

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