The effect of heat treatment in the reducing atmosphere on the physical properties of TiO2 thin films prepared by sol–gel method

Abstract

Multilayered nanostructured TiO2 thin films were prepared by sol–gel and dipping deposition on quartz substrate followed by thermal treatment under reducing atmosphere (20 %H2–80 %Ar). Heat treatment at progressively higher temperatures caused structural, morphological, and optical changes, which were investigated by X-ray diffraction (XRD), atomic force microscopy, scanning electron microscopy, and UV–Vis spectroscopy. The conductivities of the thin films were also measured by 4-point probe method. The XRD results showed that the calcined TiO2 thin films consist of single anatase phase which was completely transformed into rutile phase after heat treatment at 1,000 °C. The grains of films grew by intra-agglomerate densification after heat treatment at higher temperatures. The root mean square roughness of the samples was found to be in the range of 0.58–3.36 nm. The partially reduced TiO2 samples have red-shifted transmittance bands due to new energy band formed by oxygen vacancies. The electrical conductivity of the films was also enhanced after heat treatment in reducing atmosphere.