Abstract
We have experimentally studied the influence of pulsed laser deposition parameters on the morphological and electrophysical parameters of vanadium oxide films. It is shown that an increase in the number of laser pulses from 10,000 to 60,000 and an oxygen pressure from 3 × 10−4 Torr to 3 × 10−2 Torr makes it possible to form vanadium oxide films with a thickness from 22.3 ± 4.4 nm to 131.7 ± 14.4 nm, a surface roughness from 7.8 ± 1.1 nm to 37.1 ± 11.2 nm, electron concentration from (0.32 ± 0.07) × 1017 cm−3 to (42.64 ± 4.46) × 1017 cm−3, electron mobility from 0.25 ± 0.03 cm2/(V·s) to 7.12 ± 1.32 cm2/(V·s), and resistivity from 6.32 ± 2.21 Ω·cm to 723.74 ± 89.21 Ω·cm. The regimes at which vanadium oxide films with a thickness of 22.3 ± 4.4 nm, a roughness of 7.8 ± 1.1 nm, and a resistivity of 6.32 ± 2.21 Ω·cm are obtained for their potential use in the fabrication of ReRAM neuromorphic systems. It is shown that a 22.3 ± 4.4 nm thick vanadium oxide film has the bipolar effect of resistive switching. The resistance in the high state was (89.42 ± 32.37) × 106 Ω, the resistance in the low state was equal to (6.34 ± 2.34) × 103 Ω, and the ratio RHRS/RLRS was about 14,104. The results can be used in the manufacture of a new generation of micro- and nanoelectronics elements to create ReRAM of neuromorphic systems based on vanadium oxide thin films.
Highlights
The biological brain has several advantages over traditional computing systems, the most important of which are learning, generalization, abstraction, and applicability [1,2,3]
The learning process itself consists in adjusting the weighting coefficients of neurons, which ensures high noise immunity and fault tolerance in solving a number of problems related to pattern recognition, adaptive control, forecasting, and diagnostics, the solution of which takes an order of magnitude longer on traditional computing systems [16,17,18]
The paper presents the results of experimental studies of the influence of the pulsed laser deposition (PLD) control parameters on the morphological and electrophysical parameters of vanadium oxide films
Summary
The biological brain has several advantages over traditional computing systems, the most important of which are learning, generalization, abstraction, and applicability [1,2,3]. The architecture faces a limitation called “von Neumann bottleneck”—physical limitation of the information transfer between the central processor and memory block [6,7]. This led to a slowdown in the development of computing systems in terms of speed and power consumption. The result of the neuromorphic system’s work is weakly dependent on the malfunction of an individual neuron This makes them attractive for use in onboard intelligent systems
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