Abstract
A resistance method is given for the determination of the thickness of thin granular metal films based on the use of impedance measurements at frequencies in the order of magnitude of 1 Mc/sec. At these frequencies the intergranular gap resistance can be seen as short circuited by the inter-granular capacitance, so that the measured resistance is that of the metal grains. As shown the resistivity of the individual grains is in general several times greater than the bulk resistivity of the metal. This difference depends strongly on the vacuum conditions and the rates of evaporation.
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