Abstract
The assembly of nanowires is important to the manufacture of microelectronic components, and dielectrophoresis is a method of assembling nanowires with low cost, good operability, accurate positioning and high assembly efficiency. In this paper, a model of the dielectric assembly of nanowires in the microelectrode system is established, and the dielectrophoretic force and electroosmotic flow of the nanowires are analyzed, and the regulations of the dielectric assembly of nanowires is obtained. Based on the preparation of planar microelectrode pairs, the nanowire dielectric assembly experiment was performed. Through the analysis of the experimental results, the regulations of nanowire dielectric assembly are consistent with the simulation.
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