The effect of dust on electron heating and dc self-bias in hydrogen diluted silane discharges

Abstract

In capacitive hydrogen diluted silane discharges the formation of dust affects plasma processes used, e.g. for thin film solar cell manufacturing. Thus, a basic understanding of the interaction between plasma and dust is required to optimize such processes. We investigate a highly diluted silane discharge experimentally using phase-resolved optical emission spectroscopy to study the electron dynamics, laser light scattering on the dust particles to relate the electron dynamics with the spatial distribution of dust, and current and voltage measurements to characterize the electrical symmetry of the discharge via the dc self-bias. The measurements are performed in single and dual frequency discharges. A mode transition from the α-mode to a bulk drift mode (Ω-mode) is found, if the amount of silane and, thereby, the amount of dust and negative ions is increased. By controlling the electrode temperatures, the dust can be distributed asymmetrically between the electrodes via the thermophoretic force. This affects both the electron heating and the discharge symmetry, i.e. a dc self-bias develops in a single frequency discharge. Using the Electrical Asymmetry Effect (EAE), the dc self-bias can be controlled in dual frequency discharges via the phase angle between the two applied frequencies. The Ω-mode is observed for all phase angles and is explained by a simple model of the electron power dissipation. The model shows that the mode transition is characterized by a phase shift between the applied voltage and the electron conduction current, and that the plasma density profile can be estimated using the measured phase shift. The control interval of the dc self-bias obtained using the EAE will be shifted, if an asymmetric dust distribution is present. However, the width of the interval remains unchanged, because the dust distribution is hardly affected by the phase angle.